AT261712B - Verfahren zur Herstellung einer optischen Maske - Google Patents
Verfahren zur Herstellung einer optischen MaskeInfo
- Publication number
- AT261712B AT261712B AT42465A AT42465A AT261712B AT 261712 B AT261712 B AT 261712B AT 42465 A AT42465 A AT 42465A AT 42465 A AT42465 A AT 42465A AT 261712 B AT261712 B AT 261712B
- Authority
- AT
- Austria
- Prior art keywords
- making
- optical mask
- mask
- optical
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Surface Treatment Of Glass (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB297364A GB1057105A (en) | 1964-01-23 | 1964-01-23 | An optical mask |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AT261712B true AT261712B (de) | 1968-05-10 |
Family
ID=9749528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT42465A AT261712B (de) | 1964-01-23 | 1965-01-20 | Verfahren zur Herstellung einer optischen Maske |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JPS5021227B1 (en]) |
| AT (1) | AT261712B (en]) |
| BE (1) | BE658730A (en]) |
| CH (1) | CH464693A (en]) |
| DE (1) | DE1521902A1 (en]) |
| FR (1) | FR1421953A (en]) |
| GB (1) | GB1057105A (en]) |
| NL (1) | NL142998B (en]) |
| SE (1) | SE336957B (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3215410A1 (de) * | 1982-04-24 | 1983-10-27 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum herstellen von oeffnungen mit hilfe einer maske in einer auf einer unterlage befindlichen schicht |
| GB2132789A (en) * | 1982-11-24 | 1984-07-11 | Western Electric Co | Method of pattern generation |
-
1964
- 1964-01-23 GB GB297364A patent/GB1057105A/en not_active Expired
-
1965
- 1965-01-19 DE DE19651521902 patent/DE1521902A1/de active Pending
- 1965-01-19 NL NL6500630A patent/NL142998B/xx not_active IP Right Cessation
- 1965-01-20 SE SE73865A patent/SE336957B/xx unknown
- 1965-01-20 CH CH81165A patent/CH464693A/de unknown
- 1965-01-20 AT AT42465A patent/AT261712B/de active
- 1965-01-20 JP JP261665A patent/JPS5021227B1/ja active Pending
- 1965-01-22 BE BE658730A patent/BE658730A/xx unknown
- 1965-01-22 FR FR3026A patent/FR1421953A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1521902A1 (de) | 1969-05-29 |
| NL6500630A (en]) | 1965-07-26 |
| SE336957B (en]) | 1971-07-19 |
| FR1421953A (fr) | 1965-12-17 |
| BE658730A (en]) | 1965-07-22 |
| NL142998B (nl) | 1974-08-15 |
| JPS5021227B1 (en]) | 1975-07-21 |
| GB1057105A (en) | 1967-02-01 |
| CH464693A (de) | 1968-10-31 |
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